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Year 2014
25MW Cell production line Ex demonstration
€1.2 million
Installation and training available
Inc 1 year warranty |
Ref 251189 |
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Equipment technical parameters
Texturing and Cell Cleaning
Sizes:-
125 * 125 * 0.20 mm
135 * 135 * 0.20 mm
156 * 156 * 0.20 mm
10 min/basket
Loading capacity of 300 / cleaning basket basket (125 * 125 * 0.20 mm)
Cleaning basket dimensiona L600 * H378 W670
Mechanical arm bearing max 40 kg |
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Cabinet, Purification console, Furnace cabinet
5 segment furnace & temperature control system
Furnace effective internal diameter: 350mm (adapted quartz tube diameter 330mm)
Temperature control range: 400 ~ 1100 °C
Effective loading capacity: 400 / tube
Thermostatic zone length and accuracy: ± 1 °C / 1080mm (801 ~ 1100 )
± 1.5 / 1080mm (400 ~ 800 °C)
Single Point Temperature Stability: ± 1 °C / 4h (at 880°C);
Temperature ramping capability:
Heating rate: ≥15 °C / min
Maximum cooling rate: 5 °C / min;
Thermostatic cooling function;
Rapid return temperature furnace tube systems
Fully automatic calibrated temperature zone.
Furnace pressure self-balancing system;
Tail centralized collection, directional emission; Exhaust
Over-temperature cut out etc
Touch screen, computer controller automatic process controlled by industrial computer
Uses BV100 bath temperature control.
Mass flow control accuracy: ≥ ± 1% FS;
Machine Uptime 95%
Total power: Peak ≥150 KVA (3 tubes), holding power approx. 75KVA (3tubes).
5 segment furnace temperature control system |
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Etching : doped silicon nitride
Etched parts: 5 ", 6" square piece
Loading capacity: 800 / batch
Plasma source: Inductively coupled plasma source (ICP source), power1kW, frequency 13.56MHz
Gas system: two-way mass flowmeter
Process gas: CF4 / O2
Vacuum: dry vacuum
Ultimate vacuum: better 3Pa
Working vacuum: 13 ~ 39Pa (determined by the specific process), set the automatic control
Control system: TFT panel + PLC control |
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Cleaner
Wafer Size:-
125 × 125 × 0.20mm
135 × 135 × 0.20mm
156 × 156 × 0.20mm
Cleaning 10min / basket
Cleaning basket load of 300 / baskets (125 × 125 × 0.20mm)
Cleaning basket Dimensions L600 × W670 × H378
Maximum load 40Kg |
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PECVD
Silicon nitride
Size 156 × 156mm2 square pieces, 125 × 125mm2 square piece
Loading capacity:-
156 × 156mm2 square pieces 144 / batch
125 × 125mm2 square pieces 196 / batch
Deposition uniformity ± 4%
Index: 1.98-2.1
Film thickness: 800Å
Temperature 150-500 °C
6 thermostatic zone length and accuracy of ± 2°C / 1200mm (400 ?)
Temperature zone stability 400 °C <± 3 ? / 4H
Heating time RT - 400 °C ≤ 25min
9 5Pa ultimate vacuum system
The Working pressure range 50Pa-300Pa
Pressure Control closed loop automatic control
Vacuum recovery time AP - 10Pa <10min
A system leak rate after stopping the pump off valve pressure rise rate <3 Pa / min
Control computer control process, color character display process parameters
Number and process, and fault diagnosis, alarm and protection functions. |
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Silk Screen Printing
Accuracy and repeatability: 2CPK @ ± 12.5 microns
Capacity: 1200 / hour
Wafer Size: 125mm × 125mm 156mm × 156mm
wafer thickness: 120 microns to 1 mm
print pressure control system: adaptive pressure balance mechanism and
closed-loop control software
stencil area: MAX 200mm × 200mm
stencil Correction: motorized adjustment
Visual positioning system: 4CCD camera and industrial cameras, automatically
Wafer edge and stencil benchmark calibration
Control System: High-speed Ethercat bus controller, offers a variety of communication interfaces
Color touch screen, keyboard & trackball mouse
Breakage rate: ≤3 ‰ |
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High Temperature Sintering Furnace
Main features
Maximum temperature: 950°C
Dimensions (mm) Dimensions: 11700 (L) X 1240 (W) X 1480 (± 30) (H)
Heating chamber dimensions: 6700 (L) X 350 (W) X 180 (H)
Cooling area size: 3000 (L) X 550 (W) X 320 (H)
Guide table size: 800 (L) X 1240 (W) X 880 (± 30) (H)
Air shower curtain on input and output
Directional infrared radiation heating lamps
Full technical spec available
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Cell Sorter
Cell Size: 125mm × 125mm, 156mm × 156mm - cell thickness: 180-330?m
Production Efficiency:> 1400 / hour
Breakage rate: <2 ‰
Fully Automatic
Light source: high-intensity xenon lamp, 200W ~ 1000W continuously adjustable (Endeas simulator)
500W and 1000W (Berger simulator)
Spectrum rating: Class A AM1.5
Repeatability: <± 0.25% (static)
Each batch of data is automatically saved as an Excel document
Power: AC220V / 20A
Gas source: air 0.4-0.7MPa 300l / Min |
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