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Year 2005 AccuFab Systems Wafer Wash and Sodium Etch Line
$100,000
Located in USA
Operational until taken out of service in early 2010
Specifications:
Megawatt production: approximately 1200 wafers per hour
Material Processed: Poly Silicon Wafers (Multi Crystalline Silicon) |
Ref 227384 |
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Process: Detergent washing, Sodium Sulfate Etch
Wafer Size processing capability: 125mm and/or 156mm Square
Wafer drying stations included in the line
Cartridge carriage through the process
Other info:
AccuFab Systems (AFS) Sodium Etch Line. Total of 20 stations, (8) cleaning, (8) etching, and (2) drying. Au-tomated loading and unloading of cartridge type carriers. Size 54’ Long x 7’ Wide and 7.5’ High; 480 V AC, 3 ph, 60 HZ, 360 Amps. Operational and maintenance manual included. |
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