Year 2005 Roth & Rau SiNa Plus Silicon Nitride Plasma Coaters



Located in USA

Operational until taken out of service in early 2010

Megawatt production: 40MW to 45MW (total of both lines. Both lines are identical)



Material: Poly Silicon (Multi Crystalline Silicon)

 Process: Ammonia & Silane Gas

 Wafer Size: 125mm and/or 156mm Square

 BOC Edwards Vacuum Pumps (3 units per line)

 ATS Loader & Unloader

 Ammonia gas panel and Ammonia fume scrubber

Lines are complete with:

Loader, Unloader, conveyor, changer and process unit.



Roth & Rau Silicon Nitride Line:

PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H; 480V AC; 3ph; Current 400A; Line Frequency 60 Hz; with (3) BOC Edwards GV 600 vacuum pumps includes (3) EH4200 Mechanical Booster pumps. Pneumatic Supply 500L/m; with Weight 22000kg; Operation and Maintenance Manual. Includes (1) ATS # 1815, SiN 1 Loader w/ Allen-Bradley PanelView 600 controller. 19'L x 11'W x 7'H; 480V AC; 3ph; Cur-rent 30A; Line Frequency 60Hz; Operation Manual included (2005). Mfg Yr: 2005. Location: USA